It is showed that the surface roughness is mainly related with the average grain size and feed per wheel revolution for the brittle materials such as single crystal silicon.

研究结果表明，对于微晶玻璃等脆性材料，其表面粗糙度主要与砂轮的平均磨粒尺寸、砂轮速度、进给量及磨削深度等因素有关。

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It is shown that the surface roughness is mainly related with the average grain size and feed per wheel revolution for the brittle materials such as single silicon.

研究结果表明，对于单晶硅等脆性材料，其表面粗糙度主要与砂轮的平均磨粒尺寸、进给量等因素有关。

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